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*If you require the stability of flow rate, please design a piping system to become the conditions of the small inclination domain in graph. |
*ADVANCE is shipping the product which change of secondary side pressure less than 3 kPa against to change of the primary side pressure of 0.1MPa under the condition of |
(Please confirm specification with spec sheet when place the order)
| Connection | PFA tube stub |
| Media | UPW, Corrosive fluid |
| Media pressure | IN let 0.3 [MPa] (MAX) |
| OUT let (back pressure) 0.1 [MPa] (MAX) | |
| Media temperature | 10-40 °C(HICV065, 130 10-90 °C) |
| Ambient temperature | 0-40 °C |
| Setting air pressure | (0.03)-(0.1) [MPa] (MAX) |
| Wetted material | Body : PTFE, Diaphragm : PTFE , Shaft : PTFE , Tube : PFA |
| Note | Keep In let pressure more than Out let pressure + 0.05MPa. |
| Don't shut off secondary side. | |
| Check setting range by spec sheet. | |
| Related regulation or standard | This products may be listed as articles to be regulated for export such as strategic materials by the Foreign Exchange and Foreign Trade Control Act. Therefore, if you intend to export these, be sure to follow the necessary procedures, such as application for an export permit from the Government. |



Particle counter
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Splay application
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In order to eliminate pulsation and provide stable flow, the HICV is installed after the pump. Also, a load on the downstream is necessary for creating backpressure to the HICV.
Note that variations in the pilot air pressure rate can affect outlet pressure/flow rate performance. Thus, a precision air regulator for supplying the pilot air to the HICV is recommended. Keep within the HICV’s specification when supplying the pilot air pressure. Applying a flow meter/pressure gauges to the plumbing line is also recommended.
For precisely regulating the outlet pressure, it is recommended to maintain the inlet pressure to the HICV at 0.05 MPa or higher than the pilot air pressure. In addition, verify the pump’s specification before operating the HICV. |
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*Be careful influence of controllability by liquid boil, air flow in. |
HICV allowed that electric regulator control liquid pressure or flow rate by analog signal. Feedback control is also possible if a sensor and a digital controller add in that system. If you need feedback control with a more quick response, please use electric-pressure converter instead of electric regulator. Be sure setting air pressure not to exceed the specification of HICV at the feedback control. |
The conventional feedback system had control delay from measurement to regulation. Therefore, that system couldn't keep up with quick change, it might amplify change. Feedback control system with HICV remove pressure fluctuation by HICV, and feedback control works to revise stabilized pressure, HICV realize responsive control.
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The HICV series has revolutionized flow control for DIW, chemical, and slurry by providing a constant rate of outlet pressure regardless of incoming pressure fluctuations, which is technologically impossible to attain by pulse dampers and stroke control valves. Via the pilot air pressure, the HICV precisely controls flow/outlet pressure to the desired setpoint even under severe fluctuating pressure conditions. The flow path of the HICV is isolated by two PTFE diaphragms; there are no moving parts. |


Media enters from the inlet, flows through the lower chamber up past the orifice into the upper pressure control chamber, and then flows out the outlet. Upper and lower chambers are isolated from exterior components by two diaphragms, which are joined to a shaft.
Pressure regulation is achieved when the control chamber pressure balances with the pilot air pressure, via upper diaphragm. When the amount of media pressure (upward pressure to the bottom section of upper diaphragm) is greater than that of the pilot pressure (downward pressure to the top section of upper diaphragm), the shaft moves upward and the flow path (orifice) narrows, causing the chamber pressure to decrease. Conversely, when the amount of pilot pressure is greater than that of the media pressure, the shaft moves downward and the flow path (orifice) widens, causing the chamber pressure to increase.
The HICV continuously works to maintain an equilibrium state of pressure by adjusting the flow path (orifice) opening via the shaft. As a result, the chamber pressure becomes fixed and outlet pressure is controlled.
Note: The HICV requires load (flow restriction) on the downstream for providing pressure into the control chamber (if no load exists, control chamber pressure decreases and the upper diaphragm is forced downward causing the valve to become fully open, losing control). In addition, there is a small offset between the pilot air pressure and outlet pressure.